Multitube thermal processing furnace (MTPF) for oxidation and LPCVD at the PSI PICO cleanroom
Description
Bei der zu beschaffende Anlage handelt es sich um einen Mehrrohr-Thermoprozessofen (MTPF), der für die Abscheidung von Materialien für Quanten-, Photonik- und Röntgenanwendungen der Gruppen in den Laboren LNQ und LXN sowie für alle Nutzer der PSI-Reinräume unerlässlich ist. Der MTPF sollte über eine...
AI Summary
The tender documents outline the requirements and conditions for the procurement of a Multitube Thermal Processing Furnace (MTPF) for the Paul Scherrer Institute (PSI). The directive emphasizes safety, health, and environmental protection (SGU) applicable to all personnel at PSI. The MTPF is essenti...
- The MTPF must process up to 50 wafers of 200 mm diameter with high uniformity and reproducibility.
- It should operate in a 24/7 mode with a guaranteed uptime of 90% and include a minimum 2-year warranty.
Risk overview
- Disproportionate requirements1
- Mandatory consortium or partnership1
- High minimum insurance coverage1
- Overly tight deadlines1
- Restrictive language requirements1
- Any other SME obstacles1
Tender documents
25 documents · 7.8 MB · PDF (11) · XLSX (8) · DOCX (6)
| Type | Pages | Size | Category | |
|---|---|---|---|---|
| 12 | 202 KB | appendix | ||
| xlsx | 2 | 27.3 KB | pricing | |
| xlsx | 2 | 27.3 KB | pricing | |
| xlsx | 1 | 20.3 KB | Form | |
| xlsx | 1 | 20.3 KB | Form |
Change history(3)
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Red Flags
6 flags identified — Overall risk: high
Financial Requirements
Technical Specifications
Tender Documents
25 documents available
Change History
3 changes detected
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